Techshare: Optics InfoBase - A versatile diffractive maskless lithography for single-shot and serial microfabrication

Friday, April 22, 2011

Optics InfoBase - A versatile diffractive maskless lithography for single-shot and serial microfabrication

Optics InfoBase - A versatile diffractive maskless lithography for single-shot and serial microfabrication

This is pretty nice way to do maskless lithography.

1 comment:

Jeremy LevyApril 22, 2011 at 12:58 PM
Scale bar is 5um. They were using 532 nm light.
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